JP2533430Y2 - Ｉｃウエーハ試験用プローブカード - Google Patents

Ｉｃウエーハ試験用プローブカード

Info

Publication number
JP2533430Y2
JP2533430Y2 JP1990104308U JP10430890U JP2533430Y2 JP 2533430 Y2 JP2533430 Y2 JP 2533430Y2 JP 1990104308 U JP1990104308 U JP 1990104308U JP 10430890 U JP10430890 U JP 10430890U JP 2533430 Y2 JP2533430 Y2 JP 2533430Y2
Authority
JP
Japan
Prior art keywords
contact
wiring board
wiring
holding body
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990104308U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463134U (en]
Inventor
勝三郎 川口
忠男 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP1990104308U priority Critical patent/JP2533430Y2/ja
Publication of JPH0463134U publication Critical patent/JPH0463134U/ja
Application granted granted Critical
Publication of JP2533430Y2 publication Critical patent/JP2533430Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990104308U 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブカード Expired - Lifetime JP2533430Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990104308U JP2533430Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990104308U JP2533430Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブカード

Publications (2)

Publication Number Publication Date
JPH0463134U JPH0463134U (en]) 1992-05-29
JP2533430Y2 true JP2533430Y2 (ja) 1997-04-23

Family

ID=31849532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990104308U Expired - Lifetime JP2533430Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブカード

Country Status (1)

Country Link
JP (1) JP2533430Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774219A (ja) * 1993-08-31 1995-03-17 Kurisutaru Device:Kk プローブ基板およびその製造方法並びにプローブ装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4912399A (en) * 1987-06-09 1990-03-27 Tektronix, Inc. Multiple lead probe for integrated circuits in wafer form
EP0304868A3 (en) * 1987-08-28 1990-10-10 Tektronix Inc. Multiple lead probe for integrated circuits in wafer form
US4906920A (en) * 1988-10-11 1990-03-06 Hewlett-Packard Company Self-leveling membrane probe

Also Published As

Publication number Publication date
JPH0463134U (en]) 1992-05-29

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Legal Events

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R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term